shows the CD swing curve for 60 and 220 nm alt PSM lines on 137 nm... | Download Scientific Diagram
Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect
Plot of Eo swing curve for 193 nm gate level resist on top of organic... | Download Scientific Diagram
Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect
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![PDF] Resist uniformity evaluation through swing curve phenomena | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/0f76bef96edbd53d3dd71f089c9e8bb1ad055e11/4-Figure2-1.png "PDF] Resist uniformity evaluation through swing curve phenomena | Semantic Scholar")
PDF] Resist uniformity evaluation through swing curve phenomena | Semantic Scholar
Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect
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Outline
A study of swing-curve physics in diffraction-based overlay
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Swing curve of the machine for various values of k | Download Scientific Diagram
Swing Curve Effect
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The swing curve collected on PFI98DA2 resist for the optical process. | Download Scientific Diagram
